Influence of Surface Preparation Prior to Thermal Nitridation on the Electrical Characteristics of Silicon Nitride Films Deposited on Polycrystalline Silicon Films
Mathews, Viju K., Thakur, Randhir P.S., Ditali, Akram, Fazan, Pierre C.Volume:
284
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-284-51
Date:
January, 1992
File:
PDF, 387 KB
english, 1992