Room Temperature Photoluminescence Spectra of Annealed...

MRS Proceedings 1992 / 1 Vol. 284

Room Temperature Photoluminescence Spectra of Annealed PECVD Silicon Nitride Thin Films

Savall, C., Bustarret, E., Stoquert, J. P., Bruyére, J. C.
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Volume:
284
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-284-77
Date:
January, 1992
File:
PDF, 358 KB
english, 1992
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