Deposition of Thin Films of Silicon Carbide on Fused Quartz...

MRS Proceedings 1992 / 1 Vol. 285

Deposition of Thin Films of Silicon Carbide on Fused Quartz and on Sapphire by Laser Ablation of Ceramic Silicon Carbide Targets

Rimai, L., Ager, R., Hangas, J., Loaothetis, E. M., Abu-ageel, Nayef, Aslam, M.
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Volume:
285
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-285-495
Date:
January, 1992
File:
PDF, 1.16 MB
english, 1992
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