In Situ Ellipsometric Observation of the Growth of Crystalline Silicon From Fluorinated Precursors
Akasaka, Tetsuya, Araki, Yuhzo, Shimizu, IsamuVolume:
297
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-297-19
Date:
January, 1993
File:
PDF, 1.00 MB
english, 1993