Study on Structural, Electrical and Optical Properties of...

MRS Proceedings 1993 / 1 Vol. 297

Study on Structural, Electrical and Optical Properties of Microcrystalline Si:H and SiC:H Films

Demichelis, F., Crovini, G., Pirri, C.F., Tresso, E., Rubino, A., Nobile, G., Terzini, E., Conte, G.
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Volume:
297
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-297-515
Date:
January, 1993
File:
PDF, 331 KB
english, 1993
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