Amorphous Silicon and Silicon-Germanium Thin-Film Transistors Formed by Ion Implantation
Sarcona, G., Hatalis, M.K., Catalano, A.Volume:
297
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-297-907
Date:
January, 1993
File:
PDF, 348 KB
english, 1993