Hydrogen Radical Annealing Effect on the Growth of Microcrystalline Silicon
Jun, Jung Mok, Park, Kyu Chang, Kim, Sung Ki, Lee, Kyung Ha, Chu, Mi Kyung, Han, Min Koo, Lee, Young Hee, Jang, JinVolume:
298
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-298-163
Date:
January, 1993
File:
PDF, 270 KB
english, 1993