Influence of Oxygen on the Iridium Silicide Formation by Rapid Thermal Annealing
Fernandez, M., Rodriguez, T., Almendra, A., Jimenez-Leube, J., Wolters, H.Volume:
299
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-299-325
Date:
January, 1994
File:
PDF, 259 KB
english, 1994