Improving The Barrier Properties of Nickel. Chrome and...

Improving The Barrier Properties of Nickel. Chrome and Nichrome Films on Silicon

Nowicki, Ronald S., Arias, Louie, Rau, Chris, Motamedi, Ahmad, Harris, David W., Baumann, Scott
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Volume:
303
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-303-375
Date:
January, 1993
File:
PDF, 329 KB
english, 1993
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