Poly-Si Thin Film Transistors Fabricated with Rapid Thermal...

MRS Proceedings 1993 / 1 Vol. 303

Poly-Si Thin Film Transistors Fabricated with Rapid Thermal Processing

Campo, E., Pedroviejo, J.J., Scheid, E., Bielle-Daspet, D., Messaoud, A. Yahia, Sarrabayrouse, G., Martinez, A.
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Volume:
303
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-303-389
Date:
January, 1993
File:
PDF, 976 KB
english, 1993
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