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Photosensitive Polyamic Acids Developable with Aqueous Alkaline Solutions
Tanaka, Jun, Kikkawa, Haruhiko, Shoji, Fusaji, Satou, Hidetaka, Kataoka, FumioVolume:
305
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-305-79
Date:
January, 1993
File:
PDF, 469 KB
english, 1993