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Planarization with Cyclotene™ 3022 (BCB) Polymer Coatings
Stokich, T.M., Fulks, C.C., Bernius, M.T., Burdeaux, D.C., Garrou, P.E., Heistand, R.H.Volume:
308
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-308-517
Date:
January, 1993
File:
PDF, 492 KB
english, 1993