Planarization with Cyclotene™ 3022 (BCB) Polymer Coatings

MRS Proceedings 1993 / 1 Vol. 308

Stokich, T.M., Fulks, C.C., Bernius, M.T., Burdeaux, D.C., Garrou, P.E., Heistand, R.H.

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Volume:

308

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-308-517

Date:

January, 1993

File:

PDF, 492 KB

english, 1993

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