Mechanical Properties of Pyrolytic "SiOCN" Thin...

MRS Proceedings 1993 / 1 Vol. 308

Mechanical Properties of Pyrolytic "SiOCN" Thin Coatings

Bec, Sandrine, Tonck, André, Loubet, Jean-Luc
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Volume:
308
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-308-577
Date:
January, 1993
File:
PDF, 1.06 MB
english, 1993
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