Stress-Temperature Behavior of O3-TEOS Sub-Atmospheric CVD...

MRS Proceedings 1993 / 1 Vol. 308

Stress-Temperature Behavior of O3-TEOS Sub-Atmospheric CVD (SACVD) Oxide Films Deposited on Various Oxide Underlayers

Robles, Stuardo A., Yieh, Ellie, Galiano, Maria, kwok, Kurt, Nguyen, Bang C.
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Volume:
308
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-308-77
Date:
January, 1993
File:
PDF, 336 KB
english, 1993
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