Incorporation of Nitrogen into Oxynitride Dielectric Through Thermal Nitridation of Silicon
Maiti, Bikas, Hao, Ming-Yin, Lee, Jack C.Volume:
309
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-309-3
Date:
January, 1993
File:
PDF, 347 KB
english, 1993