Effect of Post-Annealing on Electrical Properties of Ta2O5...

MRS Proceedings 1993 / 1 Vol. 309

Effect of Post-Annealing on Electrical Properties of Ta2O5 Thin Film Deposited by Pecvd Using TaCl5 and N2O

Park, Jong-Wan, Han, S.W., Moon, H.S., Lee, J.S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
309
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-309-9
Date:
January, 1993
File:
PDF, 791 KB
english, 1993
Conversion to is in progress
Conversion to is failed