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Effect of TiN Anneal Ambient on The Microstructure and Electromigration Performance Of Al-Based Alloys
Olowolafe, J. Olufemi, Lee, Charles, Kawasaki, Hisao, Gelatos, Carol, Blumenthal, Roc, Theodore, N. David, Gregory, R. B.Volume:
309
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-309-95
Date:
January, 1993
File:
PDF, 1.35 MB
english, 1993