Piezoelectric and Capacitative Microactuators and Devices

MRS Proceedings 1993 / 1 Vol. 310

Piezoelectric and Capacitative Microactuators and Devices

Sayer, M., Barrow, D., Zou, L., Kumar, C.V.R. Vasant, Noteboom, R., Knapik, D.A., Schindel, D.W., Hutchins, D.A.
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Volume:
310
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-310-37
Date:
January, 1993
File:
PDF, 2.72 MB
english, 1993
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