Deposition of Dielectric Thin Films by Atomic Layer Epitaxy...

MRS Proceedings 1993 / 1 Vol. 310

Deposition of Dielectric Thin Films by Atomic Layer Epitaxy and Their Application for Electroluminescence Displays

Lee, Dong Heon, Cho, Yong Soo, Lee, Jeon Kook, Jung, Hyung Jin
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Volume:
310
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-310-397
Date:
January, 1993
File:
PDF, 613 KB
english, 1993
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