![](/img/cover-not-exists.png)
Ultra-Thin Sputtered Pzt Films for Ulsi Drams
Kim, Jiyoung, Sudhama, C., Khamankar, Rajesh, Lee, JackVolume:
310
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-310-473
Date:
January, 1993
File:
PDF, 910 KB
english, 1993