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Low Temperature Si Homoepitaxy: Effects of Impurities on Microstructure
Adamst, D. P., Eaglesham, D. J., Yalisove, S. M.Volume:
312
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-312-29
Date:
January, 1993
File:
PDF, 1.70 MB
english, 1993