Si(100) Surface Corrosion by NH4F Studied Using High...

MRS Proceedings 1993 / 1 Vol. 315

Si(100) Surface Corrosion by NH4F Studied Using High Spatial Resolution Secondary Electron Imaging in a UHV - STEM

Drucker, Jeff, Bandari, A., Burrows, V.V.
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Volume:
315
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-315-479
Date:
January, 1993
File:
PDF, 2.79 MB
english, 1993
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