Effects of Hydrogen Terminated Substrate Surface on...

MRS Proceedings 1993 / 1 Vol. 315

Effects of Hydrogen Terminated Substrate Surface on Succeeding Selective Deposition

Tsubouchi, Kazuo, Masu, Kazuya
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Volume:
315
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-315-59
Date:
January, 1993
File:
PDF, 2.67 MB
english, 1993
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