Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth

MRS Proceedings 1993 / 1 Vol. 315

Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth

Ramm, Juergen, Beck, Eugen, Eisele, Ignaz, Hansch, Walter, Klepser, Bernd-Ulrich, Senn, Hans
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Volume:
315
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-315-91
Date:
January, 1993
File:
PDF, 1.53 MB
english, 1993
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