![](/img/cover-not-exists.png)
Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth
Ramm, Juergen, Beck, Eugen, Eisele, Ignaz, Hansch, Walter, Klepser, Bernd-Ulrich, Senn, HansVolume:
315
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-315-91
Date:
January, 1993
File:
PDF, 1.53 MB
english, 1993