Ultrathin Nitride Films Grown Under Low-Energy Ion Bombardment
Ren, Zhong-Min, Ying, Zhi-Feng, Xiong, Xia-Xing, He, Mao-Qi, DU, Yuan-Cheng, Chen, Liang-Yao, Li, Fu-MingVolume:
316
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-316-809
Date:
January, 1993
File:
PDF, 242 KB
english, 1993