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Stresses in Ion Assisted Deposited Oxide Thih Films
Ghanashyam Krishna, M., Al Robaee, Mansour, Kanakaraju, S., Narasimha Rao, K., Mohan, S.Volume:
316
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-316-929
Date:
January, 1993
File:
PDF, 279 KB
english, 1993