Growth and Characterization of Silicon-Germanium Films on Oxide by VLPCVD/PE-VLPCVD
Tsai, Julie A., Reif, RafaelVolume:
317
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-317-603
Date:
January, 1993
File:
PDF, 1.26 MB
english, 1993