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Initial Stage of Heteroepitaxial Growth of SiC on Si by Gas Source MBE Using Hydrocarbon Radicals
Fuyuki, Takashi, Tarui, Yoichiro, Hatayama, Tomoaki, Matsunami, HiroyukiVolume:
318
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-318-201
Date:
January, 1993
File:
PDF, 2.43 MB
english, 1993