Microstructural Evolution and Stress Relaxation in...

MRS Proceedings 1993 / 1 Vol. 318

Microstructural Evolution and Stress Relaxation in Sputtered Tungsten Films

Ross, F. M., Kola, R. R., Hull, R., Bean, J. C.
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Volume:
318
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-318-697
Date:
January, 1993
File:
PDF, 3.25 MB
english, 1993
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