Microstructural Examination of Extended Crystal Defects in...

MRS Proceedings 1993 / 1 Vol. 319

Microstructural Examination of Extended Crystal Defects in Silicon Selective Epitaxial Growth (SEG)

Yen, Haw, Bashir, Rashid, Kvam, Eric P., Neudeck, Gerold W.
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Volume:
319
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-319-195
Date:
January, 1993
File:
PDF, 3.10 MB
english, 1993
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