Ion Beam Synthesis of Buried CoxNi1−xSi2 Layers in Silicon

MRS Proceedings 1993 / 1 Vol. 320

Ion Beam Synthesis of Buried CoxNi1−xSi2 Layers in Silicon

Wu, M.F., De Wachter, J., Van Bavel, A.-M., Pattyn, H., Langouche, G., Vanhellemont, J., Bender, H., Temst, K., Wuyts, B., Bruynseraede, Y.
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Volume:
320
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-320-159
Date:
January, 1993
File:
PDF, 703 KB
english, 1993
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