Self-Aligned Formation of C54 Titanium Germanosilicide...

Self-Aligned Formation of C54 Titanium Germanosilicide Using Rapid Thermal Processing and Application to Raised, Ultrashallow Junctions

Ashburn, Stanton P., Grider, Douglas T., ÖztÜrk, Mehmet C., Harris, Gari, Maher, Dennis M.
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Volume:
320
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-320-311
Date:
January, 1993
File:
PDF, 475 KB
english, 1993
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