Self-Aligned Formation of C54 Titanium Germanosilicide Using Rapid Thermal Processing and Application to Raised, Ultrashallow Junctions
Ashburn, Stanton P., Grider, Douglas T., ÖztÜrk, Mehmet C., Harris, Gari, Maher, Dennis M.Volume:
320
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-320-311
Date:
January, 1993
File:
PDF, 475 KB
english, 1993