Direct Solid State Phase Transformation from Co to...

MRS Proceedings 1993 / 1 Vol. 320

Direct Solid State Phase Transformation from Co to Epitaxial CoSi2 in Co / Thin Ti / (100) Si Structure and its Application for Shallow Junction Formation

Ogawa, Shinichi, Fair, James A., Kouzaki, Takashi, Sinclair, Robert, Jones, Erin C., Cheung, Nathan W., Fraser, David B.
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Volume:
320
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-320-355
Date:
January, 1993
File:
PDF, 2.16 MB
english, 1993
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