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The Application of Solid Phase Epitaxy for the Incorporation of Substitutional Carbon in Silicon
Candelaria, Jon J., Watanabe, J. K., Da Vid Theodore, N., Gregory, Richard B., Schroder, Dieter K., Stout, Lawrence M., Cave, Nigel G.Volume:
321
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-321-473
Date:
January, 1993
File:
PDF, 309 KB
english, 1993