Low Stress, High Resolution Photosensitive Polyimide Based on a BPDA/PDA/6FDAm Copolymer
Angelopoulos, Marie, Gelorme, Jeff, Swanson, Sally, Labadie, JeffVolume:
323
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-323-259
Date:
January, 1993
File:
PDF, 1.79 MB
english, 1993