Micro-ATR-IR as a Probe of BCB Layers for MCM-D/L...

MRS Proceedings 1993 / 1 Vol. 323

Micro-ATR-IR as a Probe of BCB Layers for MCM-D/L Applications

Mohler, C. E., Strandjord, A. J. G., Castillo, D. W., Stachowiak, M. R., Heistand, R. H., Garrou, P. E., Tessier, T. G.
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Volume:
323
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-323-295
Date:
January, 1993
File:
PDF, 370 KB
english, 1993
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