Strong Visible Photoluminescence in Silicon Nitride thin Films Deposited at High Rates
Deshpande, Sadanand V., Gulari, Erdogan, Brown, Steven W., Rand, S.C.Volume:
325
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-325-177
Date:
January, 1993
File:
PDF, 299 KB
english, 1993