Growth of Multi-Layer Si/Si1-xGex Structures Using Rapid...

MRS Proceedings 1993 / 1 Vol. 326

Growth of Multi-Layer Si/Si1-xGex Structures Using Rapid Thermal Chemical Vapour Deposition

W.Mcneill, David, Armstrong, B.Mervyn, S.Gamble, Harold
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Volume:
326
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-326-187
Date:
January, 1993
File:
PDF, 329 KB
english, 1993
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