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Selective Area Omvpe Growth of GaInP on Patterned GaAs Substrates Using Semimetallic Amorphous Carbon Mask
Whittingham, Keith L., Pitts, Bobby L., Redinbo, Gregory F., Shealy, James R.Volume:
326
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-326-55
Date:
January, 1993
File:
PDF, 3.01 MB
english, 1993