Selective Area Omvpe Growth of GaInP on Patterned GaAs...

Selective Area Omvpe Growth of GaInP on Patterned GaAs Substrates Using Semimetallic Amorphous Carbon Mask

Whittingham, Keith L., Pitts, Bobby L., Redinbo, Gregory F., Shealy, James R.
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Volume:
326
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-326-55
Date:
January, 1993
File:
PDF, 3.01 MB
english, 1993
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