Processing and Property Evaluation of Si(N,C) Coatings on...

Processing and Property Evaluation of Si(N,C) Coatings on Silica Glass/Quartz Substrates

Gonsalves, Kenneth E., Xiao, Tongsan D., Strutt, Peter R.
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Volume:
327
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-327-287
Date:
January, 1993
File:
PDF, 321 KB
english, 1993
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