An Epitaxial Regrowth of Polysilicon to Single Crystal Silicon By H2 Annealing Process
Hirofuji, Yuichi, Nomura, Noboru, Kugimiya, KoichiVolume:
33
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-33-187
Date:
January, 1984
File:
PDF, 761 KB
english, 1984