Gaas Etching by C12 and HCI: Ga- vs. As- Limited Etching

MRS Proceedings 1993 / 1 Vol. 334

Gaas Etching by C12 and HCI: Ga- vs. As- Limited Etching

Su, Chaochin, Dai, Zi-Guo, Hou, Hui-Qi, Xi, Ming, Vernon, Matthew F., Bent, Brian E.
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Volume:
334
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-334-413
Date:
January, 1993
File:
PDF, 376 KB
english, 1993
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