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Cleaning during Initial Stages of Epitaxial Growth in an Ultrahigh Vacuum Rapid Thermal Chemical Vapor Deposition Reactor
Sanganeria, Mahesh K., Violette, Katherine E., ÖZtÜRk, Mehmet C., Harris, Gari, Lee, C. Archie, Maher, Dennis. M.Volume:
334
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-334-463
Date:
January, 1993
File:
PDF, 494 KB
english, 1993