Effects of N2 Plasma Treatment on SiO2 Gate Insulator in...

Effects of N2 Plasma Treatment on SiO2 Gate Insulator in a-Si:H Thin Film Transistor

Kim, Sung Chul, Bae, Sung Sig, Oh, Eui Yeol, Kim, Jeong Hyun, Lee, Jong Wan, Kim, Cha Yeon, Kim, Donggil
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
336
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-336-775
Date:
January, 1994
File:
PDF, 338 KB
english, 1994
Conversion to is in progress
Conversion to is failed