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Copper Metallization Manufacturing Issues for Future ICs
Gutmann, Ronald J., Paul Chow, T., Gill, William N., Kaloyeros, Alain E., Lanford, William A., Murarka, Shyam P.Volume:
337
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-337-41
Date:
January, 1994
File:
PDF, 2.85 MB
english, 1994