Buried Schottky Contacts in Patterned Cobalt Silicide...

MRS Proceedings 1994 / 1 Vol. 337

Buried Schottky Contacts in Patterned Cobalt Silicide Layers in Silicon Using Wafer Bonding

ThungströM, GöRan, FröJdh, Christer, Petersson, C. Sture
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Volume:
337
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-337-475
Date:
January, 1994
File:
PDF, 804 KB
english, 1994
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