Simulation of Collimated Titanium Nitride Physical Vapor...

MRS Proceedings 1994 / 1 Vol. 337

Simulation of Collimated Titanium Nitride Physical Vapor Deposition using EVOLVE

Toprac, Anthony J., Wang, Shi-Qing, Schlueter, Jim, Cale, Timothy S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
337
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-337-547
Date:
January, 1994
File:
PDF, 309 KB
english, 1994
Conversion to is in progress
Conversion to is failed