Electromigration Properties and their Correlation to the Physical Characteristics of Multilevel Metallizations
Gadepally, Kamesh, Geha, Sam, Myers, Edward R., Thomas, Michael E.Volume:
338
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-338-301
Date:
January, 1994
File:
PDF, 2.06 MB
english, 1994