Organic Polymer Dielectrics in Microelectronic...

MRS Proceedings 1994 / 1 Vol. 338

Organic Polymer Dielectrics in Microelectronic Technologies: Reliability Requirements, Testing, and Qualification

Townsend, P. H., Heistand, R. H., Castillo, D., Stokich, T. M., Allen, B., Radler, M., Tarnowski, T., Blackson, J., Klassen, H., Miller, B., Theide, H., Strandberg, J., Karlsson, A.
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Volume:
338
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-338-589
Date:
January, 1994
File:
PDF, 4.36 MB
english, 1994
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