Cobalt Silicide OHMIC Contacts to 6H-SiC

MRS Proceedings 1994 / 1 Vol. 339

Cobalt Silicide OHMIC Contacts to 6H-SiC

Lundberg, Nils, Östling, M.
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Volume:
339
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-339-229
Date:
January, 1994
File:
PDF, 338 KB
english, 1994
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